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Oxford Instruments Plasma Technology
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Optogan buys Plasmapro etch and deposition systems
The Optogan Group, a specialist in the manufacture of light-emitting diodes (LEDs), has placed a multi-system order for Oxford Instruments Plasma Technology's etch and deposition systems.
Oxford improves endpointing on plasma etch tools
Oxford Instruments Plasma Technology has announced improved endpointing capability on its range of plasma etch and deposition tools, with the introduction of the CCD1 Spectrometer system.
Nanofab tool influences nanostructure growth
Oxford Instruments Plasma Technology (OIPT), has launched the Nanofab800Agile System.
Oxford Instruments releases HVPE reactor
Oxford Instruments has launched Crystalflex, a multi-wafer hydride vapour-phase epitaxy (HVPE) reactor.
Oxford Instruments produces semi-polar GaN layers
The technical team at Oxford Instruments-TDI, led by Dr Alexander Usikov, is working closely with a light-emitting diode (LED) manufacturer to make semi-polar GaN layers for optoelectronic devices.
