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Novellus Systems
Contact
- Address
- Novellus Systems 4000 North First Street San Jose CA 95134 USA
- Phone
- 001 408 943 9700
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Liner-barrier film for advanced memory devices
Novellus Systems has developed a Directfill CVD tungsten nitride (WN) liner-barrier film for the tungsten via to copper interconnect application in advanced memory devices.
