Nanofab tool influences nanostructure growth
Oxford Instruments Plasma Technology
Oxford Instruments Nanofab800Agile System
Oxford Instruments Plasma Technology (OIPT), has launched the Nanofab800Agile System.
The product extends the Nanofab range of flexible tools and processes which deliver catalyst treatment and controllable growth of nanotubes and nanowires, in addition to delivering standard and high-temperature PECVD.
The Nanofab800Agile System provides development opportunities to influence the growth of nanostructures.
With temperature up to 800C and agile heating and cooling for rapid turnaround, the System also delivers control of alignment and dimensions of the nanostructures.
Additional benefits include variable sample sizes up to maximum 200mm wafers, temperature uniformity, and agile temperature control.
The system is configured with a vacuum-load lock to ensure process repeatability and chamber cleanliness.
Featuring an optional liquid-source delivery system and custom-developed setup for aligned growth and control of film stress, the Nanofab800Agile has the ability to process in high-pressure and high-flow regimes.
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