IMEC presents 11 megapixel micro-mirror array
IMEC
11 megapixel micro-mirror array
IMEC has presented a monolithically integrated 11 megapixel micro-mirror array for high-end industrial applications at the IEEE International Electron Devices Meeting.
Each mirror in the array is 8um x 8um and can be individually tilted by the high-speed integrated Cmos circuitry underneath the array.
This device fits in IMEC's Cmore initiative, which offers cost-effective solutions for continued system scaling, not by shrinking Cmos but by focusing on monolithic co-integration of heterogeneous technology.
IMEC's 10cm 11 megapixel mirror array has a pixel density that is almost double that of comparable state-of-the-art micro-mirrors.
IMEC has demonstrated that its mirrors show no creep and meet a 1,012 cycles mechanical lifetime.
Integrated micro-mirror arrays such as this one may be used in video projection or lithography mask writers.
IMEC fabricated the 8um mirrors on top of foundry high-voltage 0.18um Cmos 200mm wafers with six interconnect levels.
The array was built using IMEC's SiGe-based Mems platform, meeting the mirror's mechanical reliability requirements, device flatness, and compatibility with high-speed Cmos.
Poly-SiGe was chosen as structural material for the mirrors, instead of Al.
Poly-SiGe solves many of the reliability issues of Al-based mirrors and it is compatible with above Cmos processing, allowing a smooth integration with the Cmos chip below.
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